Overview of Equipment and Application Fields

The EZ6-S Precision Coater is a portable manual spin coating instrument for laboratory research and small-batch sample preparation. Adopting a simplified manual control design instead of complex automatic programming, it is easy to operate and highly adaptable.

Equipped with a compact and lightweight structure, it can be placed in fume hoods, clean benches and glove boxes. With solvent-resistant inner cavity and transparent protective cover, it ensures safe operation. It is widely used for photoresist coating, sol-gel films, perovskite materials and functional nano-coating preparation, suitable for university teaching and laboratory daily research.

Core Functional Highlights

High-Stability Operation & Accurate Manual Control

Built-in high-quality brushless DC motor runs stably with low noise. The speed range is 100–12000 rpm to meet conventional solution coating demands. Matched with digital manual speed regulation, rotating speed can be adjusted in real time for flexible process exploration, and stable motor performance guarantees good experimental repeatability.

Compact & Multi-Scenario Adaptation

Small footprint similar to A4 paper, light weight and easy to move. It supports vacuum adsorption fixing, compatible with small fragments, square substrates and 6-inch circular wafers with different clamps. It can work normally in limited spaces such as glove boxes to meet the preparation needs of special sensitive materials.

Durable Material & Safe Structure

The inner cavity and liquid receiving tray are made of high corrosion-resistant HDPE material, resistant to common organic solvents and easy to clean. The transparent PC protective cover facilitates real-time observation and prevents liquid splashing. External vacuum interface provides stable substrate adsorption to avoid falling off during high-speed rotation.

Simple Structure & Low Maintenance Cost

With a reasonable simplified structure, the failure rate is low and daily maintenance is convenient. It meets basic spin coating demands at a reasonable cost, providing cost-effective thin film preparation solutions for laboratories with limited budgets.

Technical Parameters and Specifications

• Speed range: 100–12000 rpm, resolution: 1 rpm

• Acceleration: 100–30000 rpm/s adjustable

• Timing range: Max 3000 s, time resolution: 0.1 s

• Supports single-step and multi-step operation with multi-group programmable programs

• Rated power supply: AC110V / AC220V optional, Chinese and English bilingual interface

• Standard configuration: 10mm, 25mm, 2-inch vacuum sample holders

• Overall weight: 12 kg

• Stable coating uniformity, applicable to mainstream photoresist and solution materials

Typical Application Scenarios

• University experimental teaching and basic material research

• Rapid sample preparation and process parameter verification in laboratories

• Spin coating of water-sensitive materials inside glove boxes

• Photoresist coating for microelectronics, MEMS and sensor processes

• Preparation of sol-gel films, nano-functional coatings and sensing thin films

• Cost-effective material development for small research teams

Product Advantages

The EZ6-S precision spin coater features a miniaturized and portable design, balancing basic coating performance and flexible operation. It adopts manual adjustable control to adapt to diversified experimental exploration, and its anti-corrosion material and safety protection structure ensure long-term stable use.

With simple operation, wide substrate compatibility and low comprehensive cost, it is practical basic experimental equipment for daily teaching, project preliminary research and small-batch sample preparation in scientific research institutions.